Silicon Carbide Ceramic Plate

Features:

• Density ≥3.10 g/cm³ | Flatness ≤0.02mm/100mm

• Surface options: Polished (Ra<0.1μm), grit-blasted, or coated

• Enhanced versions available with Al₂O₃/Si₃N₄ composites

Applications:
✔ Semiconductor wafer processing susceptors (replaces aluminum)
✔ Photovoltaic polysilicon ingot furnace components
✔ High-temperature sintering furnace guide rails